Direct thermal conductance measurements on suspended monocrystalline nanostructures

We describe and demonstrate a new class of devices that enable direct thermal conductance measurements on monocrystalline nanostructures. These are possible through our newly developed techniques for three-dimensional, successive surface nanomachining of GaAs-based heterostructures. Our methods allow the patterning of complex devices comprising electrically insulating, mesoscopic thermal conductors with separate, thermal transducers in situ. Intimate thermal contact between these elements is provided by their epitaxial registry. Low-temperature thermal conductance measurements indicate that phonon boundary scattering in these initial nanometer is scale structures is partially specular. These devices offer promise for ultrasensitive bolometry and calorimetry. © 1997 American Institute of Physics. @S0003-6951~97!02720-4#